Dark Field（暗场缺陷检测）
涌淳半导体专注于半导体工艺设备的研发、制造、销售及售后一体化服务，提供半导体厂商工艺设备的一站式解决方案。
关键词：
半导体设备、半导体工艺
所属分类：
产品描述
Dark Field detectors collect scattered light over a large angular range, which provides high sensitivity for detection of small defects. Particles, scratches, missing patterns, as well as other surface contamination and pattern anomalies on the surface of the wafer scatter the incident laser light in various understood patterns.
产品询价
