CDSEM(线宽检测)
涌淳半导体专注于半导体工艺设备的研发、制造、销售及售后一体化服务,提供半导体厂商工艺设备的一站式解决方案。
关键词:
半导体设备、半导体工艺
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产品描述
CD-SEMs (critical dimension scanning electron microscopes) are widely used as the main tool for CD measurement in semiconductor processes. In recent years they have helped in achieving improved precision for smaller design rules, and faster measurements for greater numbers of measurement points. New functions have also been implemented, such as automation of measurements through the effective utilization of design data, and measurement of hazardous locations using positional information.
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